JPH0257333B2 - - Google Patents

Info

Publication number
JPH0257333B2
JPH0257333B2 JP56078099A JP7809981A JPH0257333B2 JP H0257333 B2 JPH0257333 B2 JP H0257333B2 JP 56078099 A JP56078099 A JP 56078099A JP 7809981 A JP7809981 A JP 7809981A JP H0257333 B2 JPH0257333 B2 JP H0257333B2
Authority
JP
Japan
Prior art keywords
wafer
optical system
projection
projection optical
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56078099A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57192929A (en
Inventor
Mineo Nomoto
Katsuhiro Iwashita
Tooru Ootsubo
Susumu Aiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56078099A priority Critical patent/JPS57192929A/ja
Priority to US06/381,675 priority patent/US4420233A/en
Publication of JPS57192929A publication Critical patent/JPS57192929A/ja
Publication of JPH0257333B2 publication Critical patent/JPH0257333B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891—Temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
    • G03B3/10—Power-operated focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
JP56078099A 1981-05-25 1981-05-25 Projector provided with automatic focusing function Granted JPS57192929A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56078099A JPS57192929A (en) 1981-05-25 1981-05-25 Projector provided with automatic focusing function
US06/381,675 US4420233A (en) 1981-05-25 1982-05-24 Projecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56078099A JPS57192929A (en) 1981-05-25 1981-05-25 Projector provided with automatic focusing function

Publications (2)

Publication Number Publication Date
JPS57192929A JPS57192929A (en) 1982-11-27
JPH0257333B2 true JPH0257333B2 (en]) 1990-12-04

Family

ID=13652419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56078099A Granted JPS57192929A (en) 1981-05-25 1981-05-25 Projector provided with automatic focusing function

Country Status (2)

Country Link
US (1) US4420233A (en])
JP (1) JPS57192929A (en])

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150424A (ja) * 1983-02-14 1984-08-28 Toshiba Corp 半導体装置の製造装置および方法
JPS6022319A (ja) * 1983-07-18 1985-02-04 Canon Inc 半導体露光装置
US4600282A (en) * 1983-11-14 1986-07-15 Canon Kabushiki Kaisha Alignment apparatus
US4669842A (en) * 1983-12-08 1987-06-02 Canon Kabushiki Kaisha Projection optical device
JPH0616478B2 (ja) * 1983-12-19 1994-03-02 株式会社ニコン 投影露光装置の位置合せ装置
US4773750A (en) * 1984-06-21 1988-09-27 Bruning John H Deep-UV lithography
US4883352A (en) * 1984-06-21 1989-11-28 American Telephone And Telegraph Company Deep-uv lithography
JPS618922A (ja) * 1984-06-25 1986-01-16 Nippon Kogaku Kk <Nikon> 投影光学装置
DE3447488A1 (de) * 1984-10-19 1986-05-07 Canon K.K., Tokio/Tokyo Projektionseinrichtung
US4714331A (en) * 1985-03-25 1987-12-22 Canon Kabushiki Kaisha Method and apparatus for automatic focusing
US4645338A (en) * 1985-04-26 1987-02-24 International Business Machines Corporation Optical system for focus correction for a lithographic tool
US5114223A (en) * 1985-07-15 1992-05-19 Canon Kabushiki Kaisha Exposure method and apparatus
JPS6232613A (ja) * 1985-08-05 1987-02-12 Canon Inc 投影露光装置
JP2830492B2 (ja) 1991-03-06 1998-12-02 株式会社ニコン 投影露光装置及び投影露光方法
JPH0636993A (ja) * 1992-05-21 1994-02-10 Canon Inc 露光装置及び半導体素子の製造方法
JP2576814B2 (ja) * 1995-06-16 1997-01-29 株式会社日立製作所 露光方法
CN101677061B (zh) 2004-03-26 2013-04-03 株式会社半导体能源研究所 激光辐照方法和激光辐照装置
US8525075B2 (en) * 2004-05-06 2013-09-03 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus
US8304313B2 (en) 2004-08-23 2012-11-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
US8395084B2 (en) * 2005-05-02 2013-03-12 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus and laser irradiation method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103850A (en) * 1961-12-14 1963-09-17 Ibm Pneumatically operated document sensing station
FR2082213A5 (en]) * 1970-03-06 1971-12-10 Delmas Jean Raymond
US3735686A (en) * 1970-12-18 1973-05-29 Sidney R Littlejohn & Co Ltd Camera systems
US3704657A (en) * 1971-05-05 1972-12-05 Computervision Corp Adaptive optical focusing system
US3748015A (en) * 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
JPS5320851B2 (en]) * 1971-11-08 1978-06-29
US3718396A (en) * 1971-12-28 1973-02-27 Licentia Gmbh System for photographic production of semiconductor micro structures
DE2225416A1 (de) * 1972-05-25 1973-12-06 Boeger Duplomat Apparate Kg Dr Verfahren zur einstellung einer reprokamera
JPS4917230A (en]) * 1972-06-02 1974-02-15
US3984678A (en) * 1974-04-05 1976-10-05 Nippon Jido Seigyo Ltd. Apparatus for automatically adjusting a microscope in focus
US3940209A (en) * 1974-07-12 1976-02-24 Magna Mir, Inc. Projector case assembly
JPS5387217A (en) * 1977-01-11 1978-08-01 Minolta Camera Co Ltd Focusing device

Also Published As

Publication number Publication date
US4420233A (en) 1983-12-13
JPS57192929A (en) 1982-11-27

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